发明名称 PRODUCTION OF SILICON NITRIDE POWDER
摘要 PROBLEM TO BE SOLVED: To readily and efficiently produce a highα-type silicon nitride powder by adding and mixing a metal silicon fine powder to a metal silicon powder and nitriding the mixture in a specified temp. range in a nonoxidative gas atmosphere containing nitrogen. SOLUTION: A metal silicon fine powder having <20μm particle size is added and mixed by 5 to 35wt.% to a metal silicone powder having 20 to 100μm particle size. The mixture as the source material is nitrided at 1150 to 1400 deg.C temp. range for 1 to 100 hours in a nonoxidative gas atmosphere containing nitrogen. As for the nitriding gas, nitrogen or ammonia or a mixture of these are preferably used. If necessary, hydrogen, argon, helium and the like may be added to control the reaction. Thereby, a highα-type silicon nitride powder having >=90%α-type component can be easily and efficiently produced.
申请公布号 JPH10101311(A) 申请公布日期 1998.04.21
申请号 JP19960281340 申请日期 1996.10.02
申请人 SHIN ETSU CHEM CO LTD 发明人 FUKUOKA HIROFUMI;KONYA YOSHIHARU
分类号 C01B21/068;(IPC1-7):C01B21/068 主分类号 C01B21/068
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