| 摘要 |
PROBLEM TO BE SOLVED: To keep controlling a flow rate even when a flow rate controlling valve fails, which has been originally operated so far, in connection with the flow rate controlling valve device controlling a flow rate. SOLUTION: This flow rate controlling valve device is equipped with a flow rate controlling main valve 4 and a flow rate controlling auxiliary valve 5, which are disposed to a fluid main passage 2, a flow rate controlling sub-valve 6 disposed to a sub-passage 3, flow rate detecting means 8 detecting a fluid flow rate, and which a control means 7 which controls the flow rate controlling main valve 4, the flow rate controlling auxiliary valve 5, and the flow rate controlling sub-valve 6 based on valve control information and detected information from the flow rate detecting means 8. When the fluid flow rate of the main passage 2 copes with the control condition of the flow rate controlling main valve 4, the control means 7 allows the auxiliary valve 5 to be kept in an opened condition, furthermore allows the flow rate controlling sub-valve 6 to be kept in a closed condition, and concurrently allows the opening of the flow rate controlling main valve 4 to be controlled based on valve control information. When the fluid flow rate of the main passage 2 does not cope with the control condition of the flow rate controlling main valve 4, it is so constituted that the auxiliary valve 5 is kept in a closed condition, and concurrently the opening of the flow rate controlling sub-valve 6 is thereby controlled based on valve control information. |
