发明名称 ELECTROLYTIC ION WATER MAKING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an electrolytic ion water making apparatus having a new electrode structure reducing running cost in a washing process, preventing the environmental pollution caused by waste water and enhancing the safety of work environment. SOLUTION: A carbon electrode (anode 4 and cathode 5) reduced in the omission of a carbon piece is used in an electrolytic tank 1 to form electrolytic ion water free from metal contamination. A crystalline carbon electrode such as graphite molded by baking has many pores and an uneven surface. Herein, after the molded elements of the electrodes 4, 5 are formed, an amorphous carbon layer is formed on the surface thereof. Since the carbon layer is deposited up to the interiors of the surface pores of the molded elements, the mutual bonding of carbon elements is increased to make the omission of a carbon piece hard to generate. Since the surfaces of the electrodes are covered with a filter 7, even if the carbon piece is omitted, it is caught by the filter 7 and the mixing of particles with electrode ion water can be prevented.
申请公布号 JPH1099858(A) 申请公布日期 1998.04.21
申请号 JP19960277353 申请日期 1996.09.28
申请人 TOSHIBA CORP 发明人 TAKAYASU ATSUSHI;MIYASHITA NAOTO
分类号 C02F1/46;C25B9/00;C25B9/06;C25B9/08;C25B9/18;C25B11/12;H01L21/304;(IPC1-7):C02F1/46 主分类号 C02F1/46
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