Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation

摘要

A method for polishing glass, ceramic, and glass-ceramic surfaces. The method includes exposing the surface to ultraviolet laser radiation under conditions effective to smooth the surface. Methods for polishing glass-ceramic surfaces containing spinel crystals using 193-351 nm radiation of a rare gas halide excimer laser operating at about 150 to about 400 mJ/cm2 are disclosed. Using the methods of the present invention, surfaces having an Ra of about 4 to about 2 ANGSTROM are produced.