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发明名称
MAKING METHOD OF SEMICONDUCTOR DEVICE STRIPPED PHOTORESIST ON THE SILICON OXIDE FILM
摘要
申请公布号
KR0134380(B1)
申请公布日期
1998.04.20
申请号
KR19880015671
申请日期
1988.11.28
申请人
N.V. PHILIPS GLOEILAMPENFABRIEKEN
发明人
VISSER, JAN;DE BOER, LUKAS
分类号
H01L21/302;G03F7/42;H01L21/3065;H01L21/311;(IPC1-7):H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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