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发明名称
FABRICATION METHOD OF CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR0134858(B1)
申请公布日期
1998.04.20
申请号
KR19940016093
申请日期
1994.07.06
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
PARK, SANG-HOON;KIM, INN-CHOL
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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