发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE METHOD THEREOF
摘要 In a semiconductor device, an n+ polysilicon layer is formed on a substrate through a gateoxide layer. A p+ source or drain diffusion layer is formed on both sides of an impurity layer in the substrate. The silicon layer positions over an intermediate portion of a channel formation layer, and has an oxide layer on upper surface thereof. The silicon layers have their side portions a p+ type polysilicon layer to be a gate electrode together with the silicon layer. The gate electrode semiconductor layer is formed on the channel formation layer through the gate insulation layer in the manner that, in a portion contacting with the gate insulation layer, the nearer portions approaches to the impurity layers of the source and drain regions, the larger a work function increases.
申请公布号 KR0134756(B1) 申请公布日期 1998.04.20
申请号 KR19930022459 申请日期 1993.10.27
申请人 TOSHIBA KK. 发明人 MASAKAZU, KAKUMU
分类号 H01L21/28;H01L21/336;H01L21/8238;H01L29/49;H01L29/78 主分类号 H01L21/28
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