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发明名称
CEILING STRUCTURE OF CLEAN ROOM
摘要
申请公布号
JPH10103730(A)
申请公布日期
1998.04.21
申请号
JP19960254805
申请日期
1996.09.26
申请人
NEC CORP
发明人
SEKIGUCHI HITOSHI
分类号
F24F7/06;B01D46/00;B01D46/10;B01D46/42;B01D46/52;E04B9/02;F24F3/16;H01L21/02;(IPC1-7):F24F7/06
主分类号
F24F7/06
代理机构
代理人
主权项
地址
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