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发明名称
VERFAHREN ZUR HERSTELLUNG EINER TI-B-N-BESCHICHTUNG AUF EINEM SUBSTRAT MITTELS SPUTTERN
摘要
申请公布号
LU87988(A1)
申请公布日期
1993.03.15
申请号
LU19910087988
申请日期
1991.08.08
申请人
COMMUNAUTE ECONOMIQUE EUROPEENNE (CEE)
发明人
WOLFRAM GISSLER;JUSTUS HAUPT;THOMAS FRIESEN
分类号
C23C14/06;(IPC1-7):C23C/
主分类号
C23C14/06
代理机构
代理人
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地址
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