| 摘要 |
<p>A method and apparatus provide a resource capable of affecting the manufacture of a product to a bay (100B) and a chase (100C). Clean resource is supplied to the bay (100B) where it is used to affect the manufacture of a product in one or more steps highly sensitive to contaminants in the resource. The resource contaminated by the manufacture of the product is then sent to a chase (100C) where it is further used to affect the manufacture of the same or a different product in steps that are less sensitive to the contamination of the resource. Because the bay (100B) is most sensitive to contaminants in the resource, the impurified resource received at the chase (100C) may not adversely affect the manufacture of products in the chase (100C) and thus, supplying a clean resource to the chase (100C) is unnecessary.</p> |
