| 摘要 |
A cleaning apparatus consists of the following structural elements; a polishing part(10) whose upper plane and lower plane keep a regular slope, a number of conveyor roller actuating axles(20) installed on the central area of the polishing part(10), a conveyor roller(40) that conveys the substrate as an object for cleaning, adhered on the conveyor roller actuating axle(20), a power transmission unit(50) which turns the conveyor roller actuating axle(20), adhered on the outside of the polishing part(10), an upper side nozzle unit and a lower side nozzle unit(62) adhered on the upper and lower sides of the conveyor roller(40) and installed so as to keep plural nozzles(60) facing each other, an exhaust tube(70) attached to the structure of the two layers and two rows around the upper side nozzle unit(61), and an exhaust duct(80) connected with the outer exhaust apparatus through the exhaust tube(70), A cover(90) is installed on the left-hand side and the right-hand side of the conveyor roller actuating axle(20) to segregate and exhaust the dust generated around the axle.
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