发明名称 |
Method of manufacturing a high capacitance capacitor using sputtering |
摘要 |
A method of fabricating a semiconductor device comprises the steps of: (a) forming a mask layer (13) over an upper surface of a semiconductor substrate (10) such that the mask layer (13) has an aperture (13a) penetrating the mask layer (13) and having an inclined lateral wall so as to make the aperture (13a) inverted taper shaped; (b) forming a first dielectric layer (14) at a first area over the upper surface of the semiconductor substrate (10) within the aperture (13a) by sputtering at a first sputtering incidence direction (I1); and (c) forming a first electrode layer (15) at a second area over the upper surface of the semiconductor substrate (10) within the aperture (13a) by sputtering at a second sputtering incidence direction (I2) which is different from the first sputtering incidence direction (I1). <IMAGE> <IMAGE>
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申请公布号 |
EP0836224(A2) |
申请公布日期 |
1998.04.15 |
申请号 |
EP19970102412 |
申请日期 |
1997.02.14 |
申请人 |
OKI ELECTRIC INDUSTRY CO., LTD. |
发明人 |
HOSHI, SHINICHI |
分类号 |
C23C14/04;C23C14/22;H01L21/02;H01L21/027;H01L21/203;H01L21/822;H01L27/04;(IPC1-7):H01L21/320 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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