发明名称 |
Polishing machine |
摘要 |
A polishing machine of the present invention is capable of uniformly polishing a member (20) to be polished with high flatness, and polishing cloth, which is employed in the polishing machine, can be uniformly abraded. In the polishing machine, a polishing plate (10) is capable of rotating. A supporting table (22) rotatably supports the polishing plate (10). A rotary driving mechanism (25) is mounted on the supporting table (22), and it (25) rotates the polishing plate (10). A base (30) supports the supporting table (22). An orbital driving mechanism (32) moves the supporting table (22) along a circular orbit without spinning about its own axis. <IMAGE> |
申请公布号 |
EP0803329(A3) |
申请公布日期 |
1998.04.15 |
申请号 |
EP19970302667 |
申请日期 |
1997.04.18 |
申请人 |
FUJIKOSHI KIKAI KOGYO KABUSHIKI KAISHA |
发明人 |
KUDO, MICHIO;INADA, YASUO;NAKAJIMA, MAKOTO;FUKUSHIMA, MASANORI |
分类号 |
B24B37/10;B24B37/12;B24B47/10;H01L21/304 |
主分类号 |
B24B37/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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