发明名称 Method for resistance measurements on a semiconductor element with controlled probe pressure
摘要 PCT No. PCT/EP91/01294 Sec. 371 Date Mar. 9, 1992 Sec. 102(e) Date Mar. 9, 1992 PCT Filed Jul. 9, 1991 PCT Pub. No. WO92/01233 PCT Pub. Date Jan. 23, 1992.A method for measuring the resistance or conductivity between two or more conductors which are placed against a semiconductor element, wherein in order to bring the contact resistance between the conductors and the element to, to hold it at,a predetermined value during measuring, the conductors are held at a constant distance and/or under constant pressure relative to the semiconductor element.
申请公布号 US5369372(A) 申请公布日期 1994.11.29
申请号 US19920838419 申请日期 1992.03.09
申请人 INTERUNIVERSITAIR MICRO ELEKTRONICA CENTRUM VZW 发明人 VANDERVORST, WILFRIED;MEURIS, MARC
分类号 G01Q60/16;G01R27/00;G01R27/20;G01R31/26;(IPC1-7):G01R27/08 主分类号 G01Q60/16
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