发明名称 |
Substrate handling and processing system for flat panel displays |
摘要 |
A vacuum processing system for handling and processing rectangular glass panels for flat panel displays has a cluster configuration. The system includes a central buffer chamber, with multiple processing chambers, a load lock and an unload lock positioned around the buffer chamber and coupled to the buffer chamber through gate valves. The buffer chamber contains a turntable that is rotatable about a vertical axis. The system further includes substrate carriers, each for supporting a substrate in a vertical orientation as it is transported through the system and is processed. The turntable has dual substrate carrier positions for rotating substrate carriers into alignment with a selected processing chamber, the load lock or the unload lock. Multiple substrates can be handled and processed concurrently to achieve a high throughput rate. The system is typically used for sputter deposition of ITO films and metal films on the glass substrate.
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申请公布号 |
US5738767(A) |
申请公布日期 |
1998.04.14 |
申请号 |
US19940342275 |
申请日期 |
1994.11.23 |
申请人 |
INTEVAC, INC. |
发明人 |
COAD, GEORGE L.;LAWSON, ERIC C.;HUGHES, JOHN LESTER |
分类号 |
C23C14/56;C03C17/00;C23C14/50;(IPC1-7):C23C14/34 |
主分类号 |
C23C14/56 |
代理机构 |
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代理人 |
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地址 |
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