| 摘要 |
PROBLEM TO BE SOLVED: To provide the heat fluid analyzing method of a molecular dynamics method used for semiconductor manufacture process simulation which shortens a calculation time even when a molecular number is large in the case of an analysis of temperature, speed, and shape variations using a parallel arithmetic processing type electronic computer. SOLUTION: A plurality of small partial areas 5 are provided in an object 4 of calculation, a detailed analysis by a molecular dynamics method is taken in the partial area 5, and proportional estimation is performed in other areas 6 to reduce a calculation quantity. Or an analysis by the molecular dynamics method is taken in an area of the object 4 of calculation which can not be handled as a continuous body and mean temporal variation of a plurality of molecules in other areas is calculated by a macroanalysis to reduce the calculation quantity. |
