| 摘要 |
PROBLEM TO BE SOLVED: To improve signal detection accuracy and recording density by constituting lands of oxidized films, thereby making the surface roughness of the lands smaller and the taper angle of the lands larger. SOLUTION: A silicon substrate 10 is heated and the silicon oxidized film 11 is formed on this substrate 10. A photoresist 12 is uniformly applied thereon and the surface of the photoresist 12 is covered with a mask 13 having the prescribed shape corresponding to the tracks of a magneto-optical disk after drying and is exposed. This photoresist is developed to remove exposed parts 12a and reactive ion etching is executed. At this time, the taper angleαof the lands 15 is increased by anisotropic etching. The patterned resist 12 is removed to form a master disk 14. As a result, the land 15 surfaces of the oxidized film 11 have the flatness of an atom level. Since the oxidized film 11 is patterned by the reactive ion etching, the taper angleθof the lands 15 increases. Consequently, the accuracy of signal detection is improved and the transparent substrate of the magneto-optical disk having the high recording density is formed.
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