| 摘要 |
PROBLEM TO BE SOLVED: To efficiently manufacture a small-sized thermoelectric generating device with an output power of in the range of severalμW to several mW, which can be used in a small-sized electronic equipment such as a wrist watch, a pocket calculator, an electric thermometer, etc. SOLUTION: Fine particles of thermoelectric material are aerosolized in an aerosolization chamber 1, are carried through a carriage pipe 3 to a film- forming chamber, and then are jetted out through a nozzle 6 onto a substrate 7 at high speed, to form a thermoelectric material film 9. By moving the substrate 7 or the nozzle 6 at a constant speed, a stripe pattern wherein p-type films and n-type films are electrically insulated can be formed on the substrate 7.
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