ALIGNMENT OF LIQUID CRYSTAL BY ATOMIC BEAM

摘要

PROBLEM TO BE SOLVED: To provide a method for aligning liquid crystals on a polyimide surface exposed to low-energy and neutral argon ion beams. SOLUTION: The energy of incident ions is changed between 75eV and 500eV and the integrated current density is changed from 100μA/cm<2> to 500mA/cm<2> . The incident angle at which alignment is measured is changed between 10 deg. and 80 deg.. The pretilt angle of the liquid crystals is changed between 0 deg. and 8 deg. by contolling treatment condition. The degradation of the polyimide to introduce charge transfer is averted by operation with a low acceleration voltage.