发明名称 SILICON-ON-INSULATOR FIELD EFFECT TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a field effect transistor which can reduce a temporary parasitic bipolar current to a low level by a silicon-on-insulator technique. SOLUTION: A gap is provided between an insulator layer 20' and a source and/or drain region of a silicon-on-insulator(SOI) field effect transistor, and the gap is made smaller than the thickness of a depletion region 110 usually surrounding the source and/or drain region, preferably with a bias of 0V. The gain in a parasitic bipolar transistor formed, together with the field effect transistor, is temporarily decreased to increase an effective base/emitter junction capacitance only during an operational mode in which parasitic bipolar conduction dominates the normal operation of the field effect transistor. Such a temporary decrease in the gain combined with the temporary decrease of high frequency response is reduced to such an extent, that a parasitic bipolar current spike is larger than a previously obtained spike. And this technique has sufficient compatibility with other techniques for decreasing such a current spike.
申请公布号 JPH1098200(A) 申请公布日期 1998.04.14
申请号 JP19970227696 申请日期 1997.08.25
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 MARIO MA PERERA;FAVORIES ASSADERAGY;LAWRENCE FREDERICK WAGNER JR
分类号 H01L27/11;H01L21/8244;H01L29/786 主分类号 H01L27/11
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