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发明名称
SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要
申请公布号
KR0131189(B1)
申请公布日期
1998.04.15
申请号
KR19930011661
申请日期
1993.06.25
申请人
TOSHIBA KK.
发明人
KOHYAMA, YUSUKE
分类号
H01L27/108;(IPC1-7):H01L27/108
主分类号
H01L27/108
代理机构
代理人
主权项
地址
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