| 摘要 |
PROBLEM TO BE SOLVED: To decrease an air damping generated between a vibrator and a substrate and increase vibration of the vibrator and prevent noises from excitation means from leaking to displacement detection means. SOLUTION: A plurality of communicating holes 30 are formed in a portion placed on a downward side of a vibrator 33 on a substrate 22. Thereby, when the vibrator 33 vibrates, an air existing between the vibrator 33 and the substrate 22 passes through each communicating hole 30 and flows out to a reverse face side of the substrate 22. Therefore, an air damping can be reduced. Further, a recessed part 28 is provided in the substrate 22 and a portion located on a downward side of a displacement detection electrode 37 on the substrate 22 is made as a thin part 29 only comprising an insulating film 24. |
