发明名称 |
Photoactive coumarin sulfonate compounds |
摘要 |
A new class of 3-diazo-3,4-dihydrocoumarin compounds which are useful as photoactive compounds in a wide variety of applications including photoresists and other opto-electronic applications are disclosed and claimed. Preferred embodiments include 6-sulfonyl-3-diazo-4-oxo-3,4-dihydrocoumarin esters. These compounds exhibit very high photosensitivity in the deep ultraviolet (DUV) region (ca. 250 nm), and therefore, are useful as photoactive compounds in DUV photoresist formulations.
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申请公布号 |
US5739295(A) |
申请公布日期 |
1998.04.14 |
申请号 |
US19970813099 |
申请日期 |
1997.03.07 |
申请人 |
HOECHST CELANESE CORPORATION |
发明人 |
ASLAM, MOHAMMAD;SHEEHAN, MICHAEL T.;KVAKOVSZKY, GEORGE;DAVENPORT, KENNETH G.;GORDON, DOUGLAS J. |
分类号 |
C07D311/56;C07D335/06;C08F12/30;C08G8/28;(IPC1-7):C07D311/20 |
主分类号 |
C07D311/56 |
代理机构 |
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