Position measuring system

摘要

A position measuring system having an illuminating device for generating a beam of light. A graduation support is provided with a graduation and a reference marker with a first set of graduation markings, where the graduation support receives the beam of light and generates a second beam of light. A scanning plate moves along a measuring direction and receives the second beam of light and generates a third beam of light, wherein the scanning plate has a second set of graduation markings for scanning the first set of graduation markings of the reference marker. A first photodetector and a second photodetector receive portions of the third beam of light and generate position-dependent electrical signals, wherein either the first set of graduation markings of the reference marker or the second set of graduation markings have a structure which deflects in the measuring direction.