摘要 |
PROBLEM TO BE SOLVED: To reliably evaporate a polycrystalline diamond thin layer of high transparency on the substrate with high adhesion by arranging a prescribed substrate near the plasma for diamond thin layer evaporation and generating a specific plasma. SOLUTION: A substrate, preferably made of glass, more preferably of borosilicate glass is polished with diamond particles of 0.05-1μparticle sizes, or uniformly coated with diamond particles of about 0.05-1μparticle sizes, then arranged near the diamond plasma for thin layer evaporation and a plasma which contains a gas mixture mainly comprises hydrogen and methane, when necessary, carbon dioxide is generated under a pressure of 1-15Torr.
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