发明名称 PHOTOSENSITIVE INSULATING MATERIAL AND MANUFACTURE OF WIRING BOARD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce poor insulation due to deposition of foreign substances on a mask and repairs therefor by laminating positive-type photosensitive resin layer and thermosetting insulating resin layer soluble to a developer. SOLUTION: On a circuit board, having a first wiring are laminated an insulating resin layer and positive-type photosensitive resin layer. After exposure to an active ray through a mask, shielding parts other than the inter-layer connection holes, inter-layer connection holes for a first circuit are opened by a developer. After developing the positive type photosensitive resin layer of the holes, this resin layer is used as an etching mask to develop the insulating resin layer. The positive-type photosensitive resin layer is then removed, such that the entire surface of this layer is again exposed to an active ray and developed to remove this layer. The insulating resin remaining on the first circuit board is hardened by light or heat and is plated with Cu.
申请公布号 JPH1098267(A) 申请公布日期 1998.04.14
申请号 JP19960249834 申请日期 1996.09.20
申请人 HITACHI CHEM CO LTD 发明人 TAKEUCHI KAZUMASA;TOMIOKA KENICHI;MORITA MASAKI;YAMADERA TAKASHI
分类号 G03F7/004;G03F7/022;G03F7/027;H05K3/46;(IPC1-7):H05K3/46 主分类号 G03F7/004
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