发明名称 OPTICAL SHORT RANGE FIELD PROBE AND MANUFACTURE THEREOF
摘要 <p>PROBLEM TO BE SOLVED: To provide an optical short range field probe of small mass, little optical loss, large degree of angular freedom as possible, provided with a vibrating operation by which adjudsting labor can be adjusted smaller due to the characteristic of an optical wave guide, and suitable for mass production. SOLUTION: This optical short range field probe is provided with only one film which contains a carrier member 10 supporting a tip 40, is transparent at least in the territory of the tip 40, and fitted to the light emitting face 9 of an optical wave guide 2 made of hard material such as glass or plastics. The measure of a film 11 at least in one direction of the plane of the film 11 is less than the diameter of the optical wave guide 2. For positioning the tip 40 on the core 3 of the optical wave guide 2, an optical method can be used, or a positioning member can be provided on the film 11 and the optical wave guide 2. Hereby, mass production is made possible by the optical short range field probe of small mass, little optical loss, and large degree of angular freedom.</p>
申请公布号 JPH1096736(A) 申请公布日期 1998.04.14
申请号 JP19970203805 申请日期 1997.07.14
申请人 INST FUER MIKROTECHNIK MAINZ GMBH;OMICRON VAKUUMPHYSIK GMBH 发明人 GUETHNER PETER;NOELL WILFRIED;RUF ALEXANDER DR;MAYR KARSTEN
分类号 G01B11/30;G01N37/00;G01Q60/18;G01Q60/22;G02B6/02;(IPC1-7):G01N37/00;G02B6/10 主分类号 G01B11/30
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