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发明名称
MICROWAVE-INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH1098152(A)
申请公布日期
1998.04.14
申请号
JP19960247873
申请日期
1996.09.19
申请人
TOSHIBA CORP
发明人
KURIYAMA YASUHIKO
分类号
H01L21/3205;H01L21/822;H01L23/52;H01L27/02;H01L27/04;H01L29/417;H01L29/423;H01L29/732;(IPC1-7):H01L27/02;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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