MICRO-MACHINED DEVICE FOR FLUIDS AND METHOD OF MANUFACTURE

摘要

The invention concerns a micro-machined device (10) for fluids comprising a substrate (12) with a flow conduit (14), a thin ductile layer (18) such as a pumping diaphragm or a diaphragm forming a check-valve. The thin layer (18) is a laminated metal sheet, preferably made of titanium and connected to the substrate (12) at the overlapping zone (20) of the flow conduit, by anodic welding. The invention is useful for producing a check-valve.