| 申请人 |
SHIN-ETSU CHEMICAL CO., LTD., TOKIO/TOKYO, JP |
发明人 |
ADACHI, FUMIAKI, C/O ENBI GIJUTSU KENKYUSHO, KAMISU-MACHI, KASHIMA-GUN, IBARAKI-KEN, JP;AMANO, TADASHI, C/O ENBI GIJUTSU KENKYUSHO, KAMISU-MACHI, KASHIMA-GUN, IBARAKI-KEN, JP;SHIROTA, YOSHIHIRO, C/O ENBI GIJUTSU KENKYUSHO, KAMISU-MACHI, KASHIMA-GUN, IBARAKI-KEN, JP;OKUNO, YOSHITAKA, C/O ENBI GIJUTSU KENKYUSHO, KAMISU-MACHI, KASHIMA-GUN, IBARAKI-KEN, JP |
