SENSOR, IN PARTICULAR ACCELEROMETER, AND ACTUATOR, AND METHOD FOR MAKING A SENSOR OR ACTUATOR STRUCTURE WITH ELECTRIC INSULATION LOCALISED IN A SUBSTRATE PLATE

摘要

The invention concerns a sensor or actuator structure comprising a first part (14) and at least a second part (16), the second part being mobile and electrically insulated with respect to the first part, the first and second parts being formed in a non-insulating substrate plate (10) with mutually adjacent edges separated by at least one ditch (18, 22a, 22b, 22c, 22d) running across the substrate (10), and the second part (16) having an extension (16b) in the form of a beam. The extension in the form of a beam (16b) has an end fixed on the first part by means of an insulating electric joint (20). The invention is useful for making accelerometers.