Akustische Oberflächenwellenanordnung und Verfahren zur Herstellung

摘要

A surface acoustic wave device having a diamond layer (2), a piezoelectric layer (3) and a comb-like electrode (4), in which the piezoelectric layer and the comb-like electrode are formed on a surface of the diamond layer, whose surface has been contacted to a substrate used in the formation of the diamond layer by a vapor phase growth method. The substrate is then removed chemically to produce a highly stable device in an economical way.