Equipment for production of chemically pure dry air

摘要

The equipment comprises a fan filter unit (2) with an open air inlet fan (3), a chemical filter and a high efficiency particulate air filter (5). Air passing through the fan filter unit is delivered to a chamber (11) with a closed construction. A device (6) is provided to produce dry air and is located inside the chamber to feed the dry air to its outer side. The pressure of air in the chamber is set so that it is higher than the pressure on the outer side of the chamber.