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发明名称
Halbleiterbeschleunigungsmessaufnehmer mit verminderter Durchbiegung der Sensorscheibe
摘要
申请公布号
DE69408779(D1)
申请公布日期
1998.04.09
申请号
DE19946008779
申请日期
1994.10.10
申请人
MOTOROLA, INC., SCHAUMBURG, ILL., US
发明人
MATSUDA, ASHER T., SCOTTSDALE, ARIZONA 85251, US
分类号
G01P15/125;H01L29/84;(IPC1-7):G01P15/125
主分类号
G01P15/125
代理机构
代理人
主权项
地址
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