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发明名称
SEMICONDUCTOR DEVICE FABRICATION
摘要
申请公布号
EP0834194(A1)
申请公布日期
1998.04.08
申请号
EP19960920938
申请日期
1996.06.14
申请人
TOTEM SEMICONDUCTOR LTD
发明人
EVANS, JONATHAN LESLIE
分类号
H01L21/265;H01L21/331;H01L21/336;H01L29/08;H01L29/423;H01L29/739;H01L29/78;(IPC1-7):H01L21/336
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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