Microelectromechanical devices including rotating plates and related methods

摘要

The invention relates to an electromechanical device which includes a first frame (50) having a first aperture therein, a second frame (52) suspended in the first frame, the second frame having a second aperture therein, and a plate (54) suspended in the second aperture. A first pair of beams (56) support the second frame (52) along a first axis relative to the first frame (50) so that the second frame rotates about the first axis. A second pair of beams (58) supports the plate (54) along a second axis relative to the second frame (52) so that the plate rotates about the second axis relative to the second frame. The first and second axes preferably intersect at a 90 DEG angle. A first set of actuators (60) provides mechanical force for rotating the second frame (52) relative to the first frame (50) about the first axis. A second set of actuators (62) provide mechanical force for rotating the plate (54) relative to the second frame (52) about the second axis. Accordingly, the plate (54) can be independently rotated relative to the first axis and the second axis.