发明名称 POLISHING METHOD AND POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a finishing face of extremely high shape accuracy by changing a pressing force of respective parts of a seat polisher against a face to be worked according to the respective Parts in pressing the face to be worked against the work faces and polishing it, while reciprocating the seat polisher. SOLUTION: A lot of electromagnets 25 (pressing adjustment means) are arranged into a matrix state in the bottom side of the top side of a seat polisher 21. A magnetic fluid layer 23 is provided across the whole face between the electromagnets 25 and the seat polisher 21. A magnetic field of the electromagnets 25 generated according to energizing direction of the electromagnets 25 to a coil 27 affects the magnetic fluid 23 so that the magnetic fluid 23 in the upper part, of the electromagnets 25 is swelled upward or recessed downward. This action can finely adjust the recesses/projections on the surface of the seat polisher 21. The action of each electromagnet 25 is controlled by an NC device 43 via an electromagnet power supply 41.
申请公布号 JPH1086053(A) 申请公布日期 1998.04.07
申请号 JP19960245200 申请日期 1996.09.17
申请人 NIKON CORP 发明人 MOGAMI AKIRA
分类号 B24B29/00;(IPC1-7):B24B29/00 主分类号 B24B29/00
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