SPUTTERING DEVICE AND TREATMENT DEPOSIT ON COLLIMATOR,申请号JP19960242092-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	SPUTTERING DEVICE AND TREATMENT DEPOSIT ON COLLIMATOR
摘要
申请公布号	JPH1088337(A)	申请公布日期	1998.04.07
申请号	JP19960242092	申请日期	1996.09.12
申请人	APPLIED MATERIALS INC	发明人	TANAKA YOICHIRO
分类号	C23C14/34;H01L21/203;H01L21/285;(IPC1-7):C23C14/34	主分类号	C23C14/34
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Production of a three-dimensional cam used for variable actuation of lifting valves in internal combustion engines comprises creating an elevation section and a circular cylindrical section from parts of the periphery of a rotation body

Welding electrode holder for welding processes comprises shaft and clamping unit for fixing rod holding electrode in shaft

Additional forklift frame for installation on forklift truck has sockets fitting over lifting forks on truck and has lifting wire connecting additional lifting forks to fixed mast on truck

Loading rail for load space has dividing point that divides rail in impact, second region closer to impact region that is movable so force transfer to first region is significantly reduced

Semiconductor unit, comprises a storage cell with primary and secondary electrodes, and an intermediate organic compound layer

Server computer`s condition remote controlling method for use in network, involves verifying log-data set from programs on server computer to check whether condition degradations are stored into log-data set

Closing cylinder for accepting an authorized key has a casing with a core moving in a stator linked to the casing via a locking connection

Sun sensor, e.g. for use in controlling a vehicle air conditioning system, has a screen arrangement and a number of light guiding bodies each allocated to a photodetector so that the screen casts a shadow dependent on sun position

Image detection method for detecting infrared radiation evaluates each signal for multiple picture elements at the same time and separately according to a 'lock-in' process

Insect repellent plaster, used to repel e.g. gnats, mites and ticks and protect from insect bites, comprises adhesive matrix comprising volatile insect repellent active agent and carrier layer permeable for active agent

Rotating end processing device for static workpiece has second adjuster for adjusting radial separation of displacement element relative to radial separation of element adjustable only by first adjuster or independently of first part

Transfer station for a wet paper web in papermaking process has a top roller operating with a smooth impermeable belt over a transfer pressure roller

Rail guide for longitudinally adjustable rear vehicle seat has ends of seat shell supporting profiles combined with displacement elements so holder and rear seat shell can be pivoted on reaching rear wheel housing for continued adjustment

Work piece support for a machine tool has a tool spindle, a driving mechanism, a clamping chuck and a swiveling tool spindle

Tea light comprises a candle with a regular polygonal cross-section such that several candles can be assembled in one plane in a formation without gaps

Household appliance e.g. for extracting juice, has safety device between open lid position and closing position such that when lid is on adjustable scanning circuit and checker, actuator of switch is movable for controlling driving motor

Building construction link fitting for prefabricated structure has a first bolt that is inserted through the centre of a second adjustment bolt

Diffraction grating for multiplexer or demultiplexer in fibre optic telecommunications cable has a defined grating profile

Press lever arrangement for press, especially for pressing fittings onto pipes, has front, rear stop faces and/or press inserts arranged in pressing mouth and forming front, rear stop faces, each with rigid positive and/or negative shape

Measurement device for exact centering of workpiece and/or part of workpiece on workpiece axis has measurement arm with associated measurement arrangement that can be displaced relative to base element