发明名称 |
Method of producing electronic, electrooptical and optical components |
摘要 |
A buried amorphous layer on a crystalline substrate with a monocrystalline surface layer, which is transformed into a mixed-crystal or chemical compound, avoids the formation of lattice defects at the interface even where the lattice parameters of the substrate and the monocrystalline layer are not matched.
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申请公布号 |
US5735949(A) |
申请公布日期 |
1998.04.07 |
申请号 |
US19910759571 |
申请日期 |
1991.09.13 |
申请人 |
FORSCHUNGSZENTRUM JULICH GMBH |
发明人 |
MANTL, SIEGFRIED;HOLLAENDER, BERND;BUTZ, RAINER |
分类号 |
C30B33/00;H01L21/20;H01L21/762;(IPC1-7):C30B1/10 |
主分类号 |
C30B33/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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