| 摘要 |
A galvanomirror includes a rocking member provided with a reflector. The rocking member is constituted of a semiconductor such as silicon, and connected to a hollow portion of a first plate through two elastic members. Second and third plates are insulatively bonded onto both sides of the first plate. Four electrodes are symmetrically provided on those portions of the second and third plates that correspond to the rocking member. In this constitution, if the rocking member is charged positively (negatively), the electrodes are charged negatively (positively), and the electrodes are charged positively (negatively), the rocking member is rotated (rocked) while the elastic members are twistedly deformed.
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