发明名称 |
Method of making white diamond film |
摘要 |
Diamond film with substantially no non-diamond carbon and a high thermal conductivity is deposited by means of a direct current arc jet apparatus with a substrate temperature below about 975 degrees Celsius, an arc power of between about 20 and 40 kw. a pressure of about 12 torr, and an enthalpy greater than 30 from a activated gas jet fed with hydrogen and methane, the methane being supplied at a concentration of less than 0.07%. The resulting material has a high transparency and thermal conductivity. Also disclosed is the use of the diamond material made by the present method for cutting tool applications, particularly milling.
|
申请公布号 |
US5736252(A) |
申请公布日期 |
1998.04.07 |
申请号 |
US19950445399 |
申请日期 |
1995.05.19 |
申请人 |
SAINT-GOBAIN/NORTON INDUSTRIAL CERAMICS CORP. |
发明人 |
BIGELOW, LOUIS K.;GRAY, KEVIN J.;LU, GRANT;SIMPSON, MATTHEW A.;CANN, GORDON L. |
分类号 |
C30B29/04;C23C16/27;(IPC1-7):B01J3/06 |
主分类号 |
C30B29/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|