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发明名称
REACTION VESSEL
摘要
申请公布号
JPH1085580(A)
申请公布日期
1998.04.07
申请号
JP19960246336
申请日期
1996.09.18
申请人
KOKUSAI ELECTRIC CO LTD
发明人
SHIMURA HIDEO;IKEDA KAZUTO;SUGIMOTO TAKESHI;YOSHIDA YUJI;YONEMITSU SHUJI
分类号
B01J3/03;B01J19/00;F27B17/00;H01L21/205;H01L21/22;(IPC1-7):B01J3/03
主分类号
B01J3/03
代理机构
代理人
主权项
地址
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