发明名称 Method for forming an improved magnetic media including sputtering of selected oxides or nitrides in the magnetic layer, and apparatus for same
摘要 A Co-Pt based magnetic alloy which has been sputtered with an oxide or nitride of a primary constituent of the magnetic layer, e.g., CoO below about 10 at. %, provides improved coercivity, squareness, and reduced noise as compared to magnetic alloys with oxygen introduced by other methods. The alloy is vacuum deposited, for example, by sputtering, and the oxide or nitride may be introduced from the sputtering target from which the magnetic layer materials come or from a separate sputtering target. Examples of such oxides and nitrides include CoO, Co2O3, Co3O4, CrO2, Cr2O3, TiO2, Ta2O5, Al2O3, WO, CoN, Co2N, TiN, TaN, CrN, NiN, etc.
申请公布号 US5736013(A) 申请公布日期 1998.04.07
申请号 US19970775987 申请日期 1997.01.03
申请人 KOMAG, INC. 发明人 RANJAN, RAJIV YADAV;LU, MIAOGEN;YAMASHITA, TSUTOMU TOM;CHEN, TU
分类号 C23C14/06;C23C14/34;C23C14/50;C23C14/56;G11B5/64;G11B5/851;H01F10/00;H01F41/18;(IPC1-7):C23C14/34 主分类号 C23C14/06
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