| 摘要 |
This invention relates to a vibration wave motor which forms a vibration wave on a vibrating member by applying frequency signals having a phase difference therebetween to electro-mechanical energy conversion elements, and uses the vibration wave as a driving force. This invention provides a motor apparatus in which a disturbance component input to the motor apparatus is estimated based on input and output signals to the motor, and the estimated disturbance component is negatively fed back, thereby eliminating the influence of a disturbance.
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