CHARGED PARTICLE BEAM EMITTING DEVICE

摘要

A charged particle beam emitting device with which an image of a sample can be observed with high resolution and in a well contrasted state by securing the moving distance of the sample or installing area of a sample stage. The emitting device which scans the sample with a charged particle beam emitted from a charged article source and accquires the scanned image of the sample based on charged particles obtained by the scanning is provided with an electromagnetic lens having a magnetic pole provided between the sample and charged particle source and at least one pair of magnetic poles which are arranged below the sample and constituted to generate a magnetic field between the poles. Therefore, the image of the sample can be observed with high resolution and in a well contrasted state while the moving distance of the sample is secured within a wide acceleration voltage range.