Verfahren zur Waferidentifizierung in der Chipfertigung und Vorrichtung zur Durchführung des Verfahrens

摘要

In chip manufacturing (front-end manufacturing), assembly installations are controlled by a process monitoring system. To supply the installation computer with the information put on the wafers (1) to identify them, for example, the code bars on the wafers must be read. The invention proposes to conduct the wafer identification before the wafers are transferred to the process line.