Alignment apparatus for loading semiconductor wafer with notch onto cassette

摘要

The apparatus is used for aligning multiple wafers (a) with corresponding notches (b) on a cassette (c) along same direction, at the notch position. Several rollers (1) for notch detection are arranged in parallel manner on the opening lower part of the cassette. The rollers are made to contact the lower part of each wafer and are driven by individual rotary drive shafts (2). Rotation drive of each roller is performed using the frictional force between the drive shafts.