Smooth surfaced poly-silicon layer production

摘要

A polysilicon layer production process involves (a) depositing an amorphous silicon layer (21) and then an optionally doped silica glass layer (31) on a substrate (1); and (b) furnace heating to effect complete crystallisation of the amorphous silicon layer (21) into a polycrystalline silicon layer and to cause flow of the glass layer (31) over the polysilicon layer.