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发明名称
Verfahren zur Regelung eines reaktiven Sputterprozesses
摘要
申请公布号
DE69313808(T2)
申请公布日期
1998.04.02
申请号
DE19936013808T
申请日期
1993.12.23
申请人
INSTITUT NATIONALE POLYTECHNIQUE DE LORRAINE, VANDOEUVRE, FR
发明人
STAUDER, BRUNO, F-54210 SAINT-NICOLAS, FR;PERRY, FREDERIC, F-54600 VILLERS-LES-NANCY, FR
分类号
C23C14/00;C23C14/54;(IPC1-7):C23C14/00
主分类号
C23C14/00
代理机构
代理人
主权项
地址
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