| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a system for evaluating the environment of a clean room by transmitting/receiving the environmental conditions of a clean room by radio. SOLUTION: The environmental evaluation system of clean room comprises a plurality of environmental condition measuring units 10 for clean room disposed at specified positions of a clean room, a transmitter 12 connected with the measuring unit 10 in order to convert a measurement sample into a signal being transferred by radio, a receiver 14 disposed in the clean room in order to convert a radio signal transferred from the transmitter 12, and a host computer 16 connected with the receiver 14 in order to analyze the measurement sample and compares it with a specified value. Since the environment can be evaluated continuously while locating the measuring units 10 freely and transmitting the measurement sample by radio, facility cost can be reduced and production efficiency can be enhanced while keeping the environment of the clean room.</p> |
